最小流量:0.1SCCM 最大流量:5000SLPM
M100标准型气体层流质量流量计与与S100标准型气体层流质量流量计的区别在于没有触摸式显示屏,通过产品内置的压力、温度传感器的精确补偿及独创核心算法,在低零点、温度、压力漂移量上表现出了杰出性能。同时,内置多种气体和混气设置,数字式和模拟式的通讯方式,实现流量的精确测量。
PIPG-M101-00-0500 | 0.5 SCCM
PIPG-M101-01-0001 | 1 SCCM
PIPG-M101-01-0002 | 2 SCCM
PIPG-M101-01-0005 | 5 SCCM
PIPG-M101-01-0010 | 10 SCCM
PIPG-M101-01-0020 | 20 SCCM
PIPG-M102-01-0050 | 50 SCCM
PIPG-M102-01-0100 | 100 SCCM
PIPG-M102-01-0200 | 200 SCCM
PIPG-M102-01-0500 | 500 SCCM
PIPG-M102-01-1000 | 1000 SCCM
PIPG-M102-01-2000 | 2000 SCCM
PIPG-M120-02-0005 | 5 SLPM
PIPG-M120-02-0010 | 10 SLPM
PIPG-M120-02-0020 | 20 SLPM
PIPG-M120-02-0050 | 50 SLPM
PIPG-M120-02-0100 | 100 SLPM
PIPG-M120-02-0200 | 200 SLPM
PIPG-M150-02-0500 | 500 SLPM
PIPG-M150-02-1000 | 1000 SLPM
PIPG-M150-02-1500 | 1500 SLPM
PIPG-M150-02-2000 | 2000 SLPM
PIPG-M150-02-3000 | 3000 SLPM
PIPG-M150-02-4000 | 4000 SLPM
PIPG-M150-02-5000 | 5000 SLPM
PIPG-M101-00-0500 | 0.5 SCCM
PIPG-M101-01-0001 | 1 SCCM
PIPG-M101-01-0002 | 2 SCCM
PIPG-M101-01-0005 | 5 SCCM
PIPG-M101-01-0010 | 10 SCCM
PIPG-M101-01-0020 | 20 SCCM