最小流量：0.1SCCM 最大流量：5000SLPM
M100-TL/TH低(高)温气体层流质量流量计在低到零下50℃，高到110℃的极端宽泛的温度区间范围内均能保持高精度、高重复性、快速响应的产品性能，避免了极端环境波动对产品测量过程产生的影响，是进行低（高）温环境条件下流量测量的理想质量流量计。
PIPG-M101-TL/TH-00-0500 | 0.5 SCCM
PIPG-M101-TL/TH-01-0001 | 1 SCCM
PIPG-M101-TL/TH-01-0002 | 2 SCCM
PIPG-M101-TL/TH-01-0005 | 5 SCCM
PIPG-M101-TL/TH-01-0010 | 10 SCCM
PIPG-M101-TL/TH-01-0020 | 20 SCCM
PIPG-M102-TL/TH-01-0050 | 50 SCCM
PIPG-M102-TL/TH-01-0100 | 100 SCCM
PIPG-M102-TL/TH-01-0200 | 200 SCCM
PIPG-M102-TL/TH-01-0500 | 500 SCCM
PIPG-M102-TL/TH-01-1000 | 1000 SCCM
PIPG-M102-TL/TH-01-2000 | 2000 SCCM
PIPG-M120-TL/TH-02-0005 | 5 SLPM
PIPG-M120-TL/TH-02-0010 | 10 SLPM
PIPG-M120-TL/TH-02-0020 | 20 SLPM
PIPG-M120-TL/TH-02-0050 | 50 SLPM
PIPG-M120-TL/TH-02-0100 | 100 SLPM
PIPG-M120-TL/TH-02-0200 | 200 SLPM
PIPG-M150-TL/TH-02-0500 | 500 SLPM
PIPG-M150-TL/TH-02-1000 | 1000 SLPM
PIPG-M150-TL/TH-02-1500 | 1500 SLPM
PIPG-M150-TL/TH-02-2000 | 2000 SLPM
PIPG-M150-TL/TH-02-3000 | 3000 SLPM
PIPG-M150-TL/TH-02-4000 | 4000 SLPM
PIPG-M150-TL/TH-02-5000 | 5000 SLPM
PIPG-M101-TL/TH-00-0500 | 0.5 SCCM
PIPG-M101-TL/TH-01-0001 | 1 SCCM
PIPG-M101-TL/TH-01-0002 | 2 SCCM
PIPG-M101-TL/TH-01-0005 | 5 SCCM
PIPG-M101-TL/TH-01-0010 | 10 SCCM
PIPG-M101-TL/TH-01-0020 | 20 SCCM
