最小流量:0.1SCCM 最大流量:5000SLPM
S100-WR宽量程型气体层流质量流量计在S100标准型层流质量流量计的基础上提高2倍的可精确测量范围,实现在10%~100%的量程范围内达到1%读数精度,并通过产品内置的压力、温度传感器的精确补偿及独创核心算法,在低零点、温度、压力漂移量上表现出了杰出性能。同时,内置多种气体和混气设置,触屏式操作的自由切换,有效简化了系统的复杂度,减少客户采购成本,提高系统的稳定度。
PIPG-S101-WR-00-0500 | 0.5 SCCM
PIPG-S101-WR-01-0001 | 1 SCCM
PIPG-S101-WR-01-0002 | 2 SCCM
PIPG-S101-WR-01-0005 | 5 SCCM
PIPG-S101-WR-01-0010 | 10 SCCM
PIPG-S101-WR-01-0020 | 20 SCCM
PIPG-S102-WR-01-0050 | 50 SCCM
PIPG-S102-WR-01-0100 | 100 SCCM
PIPG-S102-WR-01-0200 | 200 SCCM
PIPG-S102-WR-01-0500 | 500 SCCM
PIPG-S102-WR-01-1000 | 1000 SCCM
PIPG-S102-WR-01-2000 | 2000 SCCM
PIPG-S120-WR-02-0005 | 5 SLPM
PIPG-S120-WR-02-0010 | 10 SLPM
PIPG-S120-WR-02-0020 | 20 SLPM
PIPG-S120-WR-02-0050 | 50 SLPM
PIPG-S120-WR-02-0100 | 100 SLPM
PIPG-S120-WR-02-0200 | 200 SLPM
PIPG-S150-WR-02-0500 | 500 SLPM
PIPG-S150-WR-02-1000 | 1000 SLPM
PIPG-S150-WR-02-1500 | 1500 SLPM
PIPG-S150-WR-02-2000 | 2000 SLPM
PIPG-S150-WR-02-3000 | 3000 SLPM
PIPG-S150-WR-02-4000 | 4000 SLPM
PIPG-S150-WR-02-5000 | 5000 SLPM
PIPG-S101-WR-00-0500 | 0.5 SCCM
PIPG-S101-WR-01-0001 | 1 SCCM
PIPG-S101-WR-01-0002 | 2 SCCM
PIPG-S101-WR-01-0005 | 5 SCCM
PIPG-S101-WR-01-0010 | 10 SCCM
PIPG-S101-WR-01-0020 | 20 SCCM